OEM Group Rotor Verification Request Form
Contact Information
Company:
A value is required.
Contact Name:
A value is required.
Phone:
A value is required.
Email:
A value is required.
Purchase Order #:
A value is required.
Date:
A value is required.
Tool Model
Select Tool Model
Spin Rinser Dryer
Spray Acid Tool
Spray Solvent Tool
Other (please specify)
Please select an item.
Specify:
Tool Bowl Size
Select Bowl Size
240
260
270
280
2300
2400
2600
Please select an item.
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Customer Product Information
Product Size:
Select Product Size
2"
3"
100mm
125mm
150mm
200mm
300mm
Other
Please select an item.
Specify:
Product Style:
Select Product Style
Round
Round Flat
Round Notched
Square
Other (please specify)
Please select an item.
Specify:
Substrate:
Select Substrate
Silicon
GaAs
Glass
Solar
Other (please specify)
Please select an item.
Specify:
Substrate Thickness:
Specify:
A value is required.
Carrier Type:
Cassette #
A value is required.
Semitool Clamshell:
(if applicable)
810R
-
Robot Loading Required
No
Yes
Handle Loading Required
No
Yes
Handle ID:
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Rotor Order Information
Connection Type
Select Connection Type
Quick Disconnect (QD)
4-Bolt (4B)
6-Bolt (6B)
Insert Rotor (IN)
Quick Change (QC)
Please select an item.
Rotor Material
Select Material
304 Stainless Steel
316 Stainless Steel (requote required)
Teflon (SAT only)
Please select an item.
Quantity
A value is required.
Balance Information
Select Balance
0-25
Full
0-10 evenly spaced
0-12 evenly spaced
Other (please specify)
Please select an item.
Specify:
Cassette H-Bar
Select H-Bar Location
H-Bar In
H-Bar Out
N/A
Please select an item.
Thin Wafer Retainer Sleeves
Select Yes or No
No
Yes
Please select an item.
Thin Wafer Retainer Sleeves Material
Select Material
PVDF (standard)
UHMW (more expensive)
PEEK (most expensive)
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Clamshell Order Information
Is a clamshell being purchased?
No
Yes
Clamshell P/N
Balance Information
Select Balance
0-25
Full
0-10 evenly spaced
0-12 evenly spaced
Other (please specify)
Please select an item.
Specify:
Clamshell Rotor P/N
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Special Instructions
Enter Any Special Instructions or Notes. If this order is to match an existing item, please include all relevant information here.